We manufacture according to your specifications. We understand your demands and requirements when it comes to high-purity media.
Vakuum
High / coarse vacuum technology for all types of CVD or similar industrial processes. Supplied as single components or as a complete, individual vacuum system with filters, sediment traps, cold traps, pumping stations and the associated automation. Also available as EX version.
Typical media
Process vacuum
Example applications
Pipe components according to client requirements
Connection flanges with and without water cooling
Central vacuum system for rinsing and cleaning processes in gas / liquid cabinets, etc.
Coarse over fine to high vacuum technology for CVD processes, sputtering, plasma and thermal processes
High vacuum pump systems for fully automatic cleaning and qualification of gas cylinders or similar media containers
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