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In high-purity media, every detail counts.

We manufacture according to your specifications. We understand your demands and requirements when it comes to high-purity media.

Typical media

  • Trichlorosilane with hydrogen (TCS in H2) as carrier gas
  • Silicon tetrachloride in oxygen (SiCl4 with O2)
  • Germanium tetrachloride in oxygen (GeCl4 with O2)
  • Phosphorus oxychloride (POCl3 with O2)
  • Trimethylaluminum in nitrogen (TMA with N2)
  • Trisilano with hydrogen (H8Si3 in H2)
  • Water with nitrogen (H2O in N2)

Example applications

  • Semiconductor industry - epitaxy


  • Filtration
  • WHG pan
  • ATEX compliant
  • TLV monitoring
  • Flame sensor