In high-purity media, every detail counts.
We manufacture according to your specifications. We understand your demands and requirements when it comes to high-purity media.
Saturator (evaporator saturation) / bubbler systems
Saturator and bubbler systems for high-purity liquids (precursors). Used for years in the semiconductor, fiber-optical and coating industries.
- Our saturator / bubbler systems help you refine the precursor feed in your process.
- Here, critical process parameters such as temperature, pressure, level, flow, etc., are automatically controlled and monitored.
- Optional mass control and measurement.
- Optional post-cleaning by recirculation.
- Typical precursors: TCS, SiCl4, GeCl4, PoCl3, TMAl, trisilano, etc.
- Optional mass flow measurement and control for optimum process control and reproducibility.
Typical media
- Trichlorosilane with hydrogen (TCS in H2) as carrier gas
- Silicon tetrachloride in oxygen (SiCl4 with O2)
- Germanium tetrachloride in oxygen (GeCl4 with O2)
- Phosphorus oxychloride (POCl3 with O2)
- Trimethylaluminum in nitrogen (TMA with N2)
- Trisilano with hydrogen (H8Si3 in H2)
- Water with nitrogen (H2O in N2)
Example applications
- Semiconductor industry - epitaxy
Options
- Filtration
- WHG pan
- ATEX compliant
- TLV monitoring
- Flame sensor
