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In high-purity media, every detail counts.

We manufacture according to your specifications. We understand your demands and requirements when it comes to high-purity media.

Typical media

  • TCS with hydrogen (H2) as carrier gas
  • SiCl4 with O2
  • GeCl4 with O2
  • POCl3 with O2
  • TMA with N2
  • Trisilano with H2
  • Water with N2

Example applications

  • Heating of gases or liquids to optimize process quality.


  • Incl. controller
  • Additional over-temperature switch
  • Double line guide for leakage detection
  • ATEX compliant