In high-purity media, every detail counts.
We manufacture according to your specifications. We understand your demands and requirements when it comes to high-purity media.
Media heaters
Media heater for pure gases and fluids. The compact design allows the direct use at the point of use. Uniform, homogeneous heat distribution allows a constant and uniform heating of the medium with minimal differential temperature without causing undesirable "hotspots".
Parts in contact with media:
- Stainless steel (1.4404, 1.4435, 316L)
- PFA
- PTFE
Heat output:
- From 300 W to 12 kW (other wattages available upon request).
Temperature measurement:
- Typically with a PT100.
Over-temperature protection:
- Typically with a PT100.
- Optionally, in addition to an over-temperature switch.
Max. temperatures:
- Depending on the media 300 °C (higher temperatures upon request).
Flow rates (examples):
- Isopropanol (IPA), 500 ml per minute, with a typical temperature rise from 20 °C to 75 °C.
- Octamethylcyclotetrasiloxane (C8H24O4Si4) OMCTS (D4) 15 kg per hour with a typical temperature rise from 20 °C to 180 °C.
- Nitrogen (N2) 300 liters per minute with a typical temperature rise from 20 °C to 180 °C.
- Silane (SiH4) 20 liters per minute with a typical temperature rise from 20 °C to 90 °C.
Control:
- Delivery as an OEM product for integration into your system
- Alternatively, incl. complete control and monitoring function
Typical media
- TCS with hydrogen (H2) as carrier gas
- SiCl4 with O2
- GeCl4 with O2
- POCl3 with O2
- TMA with N2
- Trisilano with H2
- Water with N2
Example applications
- Heating of gases or liquids to optimize process quality.
Options
- Incl. controller
- Additional over-temperature switch
- Double line guide for leakage detection
- ATEX compliant
