In high-purity media, every detail counts.
We manufacture according to your specifications. We understand your demands and requirements when it comes to high-purity media.
Dosing and Mixing Systems
Fully automated mixing and dispensing systems for gases and liquids. Proven for decades in the fiber-optical and semiconductor industry.
- Fully automated system with recipe management and / or interface for data transfer.
- Designed for a wide variety of media (even flammable, explosive and poisonous / toxic media).
- Also in combination with an integrated evaporator available for dosing of liquid chemicals in gaseous media.
- Optional monitoring of the mixing ratio.
Typical media
Examples:
- Isopropanol in nitrogen (IPA in N2)
- Tetraethyl orthosilicate in nitrogen (TEOS in N2)
- Acetic acid in nitrogen (C2H4O2 in N2)
- Water in nitrogen (H2O in N2)
- Toluene in nitrogen (C7H8 in N2)
- Germanium tetrachloride in oxygen (GeCl4 in O2)
- Phosphorus oxychloride in oxygen (POCl3 in O2)
- etc.
Example applications
- Coating technology
- Surface treatment
Options
- Filtration
- WHG pan
- ATEX compliant
- Recirculation
