In high-purity media, every detail counts.
We manufacture according to your specifications. We understand your demands and requirements when it comes to high-purity media.
Dispensing systems
Dispensing systems for liquids and process gases. Used since years in the semiconductor, fiber-optical and coating industries.
- Partially or fully automated dispensing systems allow for safe process media handling.
- Optimum design for your process requirements.
- Bubble-free and noninterrupted supply.
- Complete emptying of the transport container.
- Dispensing systems for many media and container sizes feasible.
- Preparation of your process media possible (filtration, temperature control, pressure control, recirculation etc.)
Typical media
Liquids (examples):
- Isopropanol (IPA)
- Tetraethyl orthosilicate (TEOS)
- Trichlorosilane (TCS)
- Trimethylaluminum (TMA)
- Hydrogen chloride (HCl)
- etc.
Gases:
- Silane (SiH4)
- Hydrogen (H2)
- Inert gases (Ar, He, N2)
- etc.
Example applications
- Central supply of chemicals / solvents from shipping containers
- Refill systems for process / laboratory equipment
- Single supply for plants
- Drain / Waste disposal systems (link)
Options
- Filtration
- Distillation
- Phase separator
- WHG pan
- ATEX compliant
- Recirculation
Downloads
Chemikalienversorgungssystem für eine Chemikalie mit automatischer- Umschaltung (Behältergröße: 33 oder 200 Liter)pdf / 97 kB technisches_datenblatt_chemikalienzentralversorgung_1x2_rev_00.pdf
Chemikalienversorgungssystem für zwei unterschiedliche Chemikalien mit einer gemeinsamen Steuerung (Behältergröße: 200 Liter)
pdf / 95 kB technisches_datenblatt_chemikalienzentralversorgung_2x1_rev_00.pdf
